TOF-SIMS provides surface quality standard for InP

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1 Vienna University of Technology, Institute of Chemical Engineering Laboratory for Chemometrics, Getreidemarkt 9/166, A-1060 Vienna, Austria [email protected], www.lcm.tuwien.ac.at 2 Vienna University of Technology, Institute of Statistics and Probability Theory Wiedner Hauptstrasse 8-10, A-1040 Vienna, Austria [email protected], www.statistik.tuwien.ac.at/public/filz 3 Max Pl...

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ژورنال

عنوان ژورنال: III-Vs Review

سال: 1999

ISSN: 0961-1290

DOI: 10.1016/s0961-1290(99)80047-7